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The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature
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A. G. İmer And R. Turan, "The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature," Nanoscience and Nanotechnology IX (NanoTR-IX) , Erzurum, Turkey, pp.130, 2013

İmer, A. G. And Turan, R. 2013. The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature. Nanoscience and Nanotechnology IX (NanoTR-IX) , (Erzurum, Turkey), 130.

İmer, A. G., & Turan, R., (2013). The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature . Nanoscience and Nanotechnology IX (NanoTR-IX) (pp.130). Erzurum, Turkey

İmer, Arife, And Rasit Turan. "The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature," Nanoscience and Nanotechnology IX (NanoTR-IX), Erzurum, Turkey, 2013

İmer, Arife G. And Turan, Rasit. "The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature." Nanoscience and Nanotechnology IX (NanoTR-IX) , Erzurum, Turkey, pp.130, 2013

İmer, A. G. And Turan, R. (2013) . "The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature." Nanoscience and Nanotechnology IX (NanoTR-IX) , Erzurum, Turkey, p.130.

@conferencepaper{conferencepaper, author={Arife Gençer İmer And author={Rasit Turan}, title={The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature}, congress name={Nanoscience and Nanotechnology IX (NanoTR-IX)}, city={Erzurum}, country={Turkey}, year={2013}, pages={130} }