The X-rays were examined, which consist of the effect of 6 MeV energized electrons on different thickness and material of targets, using the MC method. When the PDDs are examined, we can see that the curves obtained for the Target 4 and Target 8 containing only tungsten material are very close PDD values to each other. The highest TPR20,10 value was also obtained for Target 8. For Target 4 and Target 8, which are composed only of tungsten material, when we examine the mean photon energy distributions formed, we observe an increase in energy towards the edge of the field. We obtained the closest TPR20,10 value for Target 6 to the TPR20,10 value generated by the original LINAC target (Target 1). However, the mean photon energy distribution value obtained for Target 6 is higher than the mean photon energy distribution value obtained from the Target 1. The mean photon energy distribution generated by the selected material according to the desired X-ray penetration and the homogeneity of this energy should be considered. The results obtained in the study are of a guiding nature both in modeling studies and for companies that will make target production.