Surface-anchored amine-terminated poly(dimethysiloxane) (PDMS) assemblies with tunable physicochemical characteristics were fabricated with a simple two-step procedure. Firstly, 3-glycidoxypropylmethyldimethoxysilane (GPDMS) molecules were self-assembled on silicon surface, and then coupled to PDMS through a surface ring-opening reaction. The structure and morphology of the amine-terminated PDMS assemblies were characterized with various techniques such as ellipsometry, contact angle goniometer, grazing angle attenuated total reflectance-Fourier transform infrared spectroscopy. X-ray photoelectron spectroscopy, and atomic force microscopy. The GPDMS monolayers were truly monomolecular films with a virtually normal molecular orientation of densely packed molecules, which were firmly tethered to the hydroxylated silicon substrate. Self-assembly of PDMS molecules resulted in the formation of homogeneous films similar to 6.3 nm thick with the surface roughness similar to 0.898 nm. The calculation of grafting parameters from experimental measurements indicated that the presence of homogeneous and densely grafted PDMS films allowed us to predict a "brushlike" regime for the polymer chains in good solvents. (C) 2010 Elsevier B.V. All rights reserved.