The effect of the post annealing on the formation of nanocrystalline SiC film deposited by PECVD at low temperature

İmer A. G., Turan R.

Nanoscience and Nanotechnology IX (NanoTR-IX), Erzurum, Turkey, 24 - 28 June 2013, pp.130

  • Publication Type: Conference Paper / Full Text
  • City: Erzurum
  • Country: Turkey
  • Page Numbers: pp.130
  • Van Yüzüncü Yıl University Affiliated: Yes