Structural characterization of Si1-xCx/SiC multilayer cosputtered films, evidence of the formation of Si nanocrytals in an amorphous matrix

İmer A. G., yıldız i., Turan R.

Europian Material Research Society (EMRS) Spring Meeting, Strazburg, France, 14 - 18 May 2012, pp.20

  • Publication Type: Conference Paper / Full Text
  • City: Strazburg
  • Country: France
  • Page Numbers: pp.20
  • Van Yüzüncü Yıl University Affiliated: Yes